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How to Improve Energy Efficiency and Reduce CO2 Emissions with Next-generation N2 Purge Systems

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"How to Improve Energy Efficiency and Reduce CO2 Emissions with Next-generation N2 Purge Systems"

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Unlocking success with inert gas purging for semiconductor manufacturing

Using piezo-based valve technology in the design of nitrogen purge systems reaps many benefits — including reducing carbon emissions by up to 4 percent, as demonstrated in a large semiconductor fab. 

What you will learn:

  • How piezo technology can make your system more energy efficient
  • How your FOUP setup can use nitrogen wisely
  • How deploying a N2 purge system can reduce large fab nitrogen consumption by 4% each year.


Offered Free by: Festo
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